发明名称 METHOD FOR FORMING FILM PATTERN, AND METHOD FOR MANUFACTURING DEVICE, ELECTRO-OPTICAL DEVICE, ELECTRONIC APPARATUS AND ACTIVE MATRIX SUBSTRATE
摘要 A method for forming a film pattern, comprises: disposing a first bank forming material to a substrate so as to form a first bank layer; disposing a second bank forming material on the first bank layer so as to form a second bank layer; and pattering the first bank layer and the second bank layer so as to form a bank including a pattern forming region having a first pattern forming region and a second pattern forming region, the second pattern forming region having a width larger than a width of the first pattern forming region, and being continuously formed from the first pattern forming region, wherein the first bank layer has a sidewall facing the pattern forming region and a first contact angle of less than 50 degrees with respect to a functional liquid containing H<SUB>2</SUB>O on the sidewall, and the second bank layer has a second contact angle larger than the first contact angle with respect to the functional liquid.
申请公布号 US2007020834(A1) 申请公布日期 2007.01.25
申请号 US20060458531 申请日期 2006.07.19
申请人 发明人 HIRAI TOSHIMITSU;MORIYA KATSUYUKI
分类号 H01L21/8234 主分类号 H01L21/8234
代理机构 代理人
主权项
地址