LIGHT SOURCE DEVICE, EXPOSURE DEVICE, AND MANUFACTURING METHOD OF DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a light source device capable of reducing pollution of an optical element included in an optical system of the latter stage.

SOLUTION: The light source device generates a plasma and supplies light radiated from the plasma to the optical system, and the concentration of hydrocarbon compound contained in a gas in a chamber covering an area of forming the plasma is 300 ppb or less.

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