| 发明名称 |
NEW ORGANIC BOTTOM ANTIREFLECTIVE POLYMER COMPOSITIONS |
| 摘要 |
<p>The present invention relates to bottom anti reflective coating compositions, polymers useful in making such compositions, and their use in image processing by forming a thin layer between a reflective substrate and a photoresist coating.</p> |
| 申请公布号 |
WO2007010385(A1) |
申请公布日期 |
2007.01.25 |
| 申请号 |
WO2006IB02041 |
申请日期 |
2006.07.19 |
| 申请人 |
AZ ELECTRONIC MATERIALS USA CORP. |
发明人 |
YAO, HUIRONG;DING-LEE, SHUJI |
| 分类号 |
C08G18/66;C08G18/38;C09D175/04;G03F7/09 |
主分类号 |
C08G18/66 |
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