| 摘要 |
In a cassette having racks for storing glass substrates, rollers are used to support a glass substrate in a rack and to move the glass substrate into and out of the cassette. Two rows of interlocking gears are used to rotate the rollers in the same direction. A transfer platform having a plurality of rollers and two rows of interlocking gears is used as a conveyor to deliver or retrieve a glass substrate to or from the cassette after the gears on the transfer platform are also engaged with the gears on a cassette stage. Alternatively, the rollers on the cassette racks and on the transfer platform are driven by inter-linking belts or chains. In a different embodiment, rollers are driven by magnetic coupling devices mechanically linking the transfer platform and the rack through magnetic coupling.
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