发明名称 SYSTEMS AND METHODS FOR NANOWIRE GROWTH AND HARVESTING
摘要 The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided. ® KIPO & WIPO 2007
申请公布号 KR20070011550(A) 申请公布日期 2007.01.24
申请号 KR20067025129 申请日期 2006.11.29
申请人 NANOSYS, INC. 发明人 PAN YAOLING;DUAN XIANGFENG;DUBROW BOB;GOLDMAN JAY;MOSTARSHED SHAHRIAR;NIU CHUNMING;ROMANO LINDA T.;STUMBO DAVE
分类号 B82B3/00;C01B31/02;C30B11/12;C30B29/60;H01L21/425 主分类号 B82B3/00
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