| 摘要 |
An excimer lamp is provided to eliminate a spring, reduce a manufacturing cost, and simplify an assembling process by using an internal electrode having a bent part. An external tube and an internal tube are disposed in the same axis in order to form a cylindrical dual tube structure. An external electrode is installed on an outer surface of the external tube. An internal electrode is installed on an inner surface of the internal tube. Excimer molecules are formed by causing dielectric barrier discharge within a discharge space between the external tube and the internal tube. The internal electrode is formed with a cylindrical metal tube having an outside diameter larger than an inside diameter of the internal tube. The internal electrode includes one or more bent parts extended in a cylindrical length direction thereof.
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