| 摘要 |
A piezoelectric/electrostrictive device (10) includes: a ceramic substrate having a frame-like thick portion (11), a thin diaphragm portion (12), and a cavity (13) formed by the thick portion and the thin diaphragm portion to communicate with the outside via a through hole (14); and a piezoelectric/electrostrictive element (2) having a layered structure including a lower electrode (21), a piezoelectric/electrostrictive film (22), and an upper electrode (23). Furthermore, the thin diaphragm portion is provided with an outward protruding arch shape, and in the piezoelectric/electrostrictive element, there remains a tensile stress parallel to a fixed surface of the element to the thin diaphragm portion. The piezoelectric/electrostrictive device is superior in response, and in the device high-precision (high-resolution, high-sensitivity) detection is possible, while effectively preventing decay of vibration of a thin diaphragm portion and maintaining displacement (amplitude) to be high. |
