| 摘要 |
A rotary transfer apparatus is provided to safely transfer a wafer by mounting a guide on a rotary plate which enlarges a portion supporting the wafer, instead of a pin. A rotary transfer apparatus includes a rotary plate(120) divided into several regions, and at least three guides(140) coupled to the rotary plate for supporting a wafer(W). The guide has a body supporting the wafer, and protrusions positioned on both edges of the body for locking the wafer in a certain region. Among sides of the protrusions, a side extending from an upper surface of the body is inclined.
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