Temperature maintenance System of Probe Card for Wafer Burn-In Test,申请号KR20050032156-传众专利搜索

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发明名称	Temperature maintenance System of Probe Card for Wafer Burn-In Test
摘要
申请公布号	KR100671485(B1)	申请公布日期	2007.01.19
申请号	KR20050032156	申请日期	2005.04.19
申请人		发明人
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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