| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent detection precision as a gas sensor from getting worse by a leak current in a heater. <P>SOLUTION: Since a heating pattern 12 in a heater pattern 10 is formed to avoid an area overlapped with a detection space 230 on a layered face, an electrode faced to at least the detection space 230, i.e. one electrode 22 in a sensor cell 20 is formed into structure not overlapped with the heating pattern 12 on the layered face. The one electrode 22 in the sensor cell 20 is a longer distant apart from the heating pattern 12 to bring high insulation resistance, compared with that when overlapped with the heating pattern 12 on the layered face, and the detection precision is hardly affected by the leak current from the heating pattern 12 as a result thereof. <P>COPYRIGHT: (C)2007,JPO&INPIT |
