APPARATUS AND METHOD FOR DROPPING LIQUID MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide an apparatus or a method for dropping a liquid material for improving a dropping precision of the liquid material. SOLUTION: The apparatus for dropping a liquid material 10 for discharging the liquid material from a nozzle 23 to drop it on a substrate 1 comprises a control apparatus 36 for controlling discharge of the liquid material from the nozzle 23 from a temperature of the liquid material. COPYRIGHT: (C)2007,JPO&INPIT