发明名称 |
MEMS switch and method for manufacturing the same |
摘要 |
A MEMS switch includes a lower substrate having a signal line on an upper surface of the lower substrate; an upper substrate, having a cavity therein, disposed apart from the upper surface of the lower substrate by a distance, and having a membrane layer on a lower surface of the upper substrate; a bimetal layer formed in the cavity of the upper substrate on the membrane layer; a heating layer formed on a lower surface of the membrane layer; and a contact member formed on a lower surface of the heating layer. The contact member can come into contact with or separate from the signal line. A method for manufacturing the MEMS switch includes preparing the upper and lower substrates and combining them so that a surface having the signal line faces a surface having the contact member and the upper and lower substrates are disposed apart by a distance.
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申请公布号 |
US2007012654(A1) |
申请公布日期 |
2007.01.18 |
申请号 |
US20060472312 |
申请日期 |
2006.06.22 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM JONG-SEOK;SONG IN-SANG;LEE SANG-HUN;KWON SANG-WOOK;KIM DUCK-HWAN;PARK YUN-KWON;JEONG HEE-MOON;HONG YOUNG-TACK;KIM CHE-HEUNG;YUN SEOK-CHUL;NAM KUANG-WOO |
分类号 |
C23F1/00;H01B13/00 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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