| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus capable of shortening the time required to determine optimum apparatus conditions. SOLUTION: The inspection apparatus is provided with: lighting means 12 and 13 for lighting an object to be inspected 11; imaging means 14 and 15 for imaging object images on the basis of diffracted light from the object to be inspected; monitor means 16 and 17 arranged on an optical axis O2 of the imaging means for monitoring the optical quantity of the diffracted light; a determination means 18 for continuously changing apparatus conditions on the angle formed by the advancing direction of the diffracted light and the direction of the optical axis of the imaging means, capturing optical quantity signals from the monitor means, and determining optimum conditions of apparatus conditions on the basis of the relation between the optical quantity signals and the apparatus conditions; and a creation means 19 for setting the apparatus conditions at the optimum conditions, capturing imaging signals from the imaging means, and creating images for inspection on the basis of the imaging signals. COPYRIGHT: (C)2007,JPO&INPIT
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