| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an immersion apparatus having an effective means of removing an immersion liquid from a surface. <P>SOLUTION: A gas knife formed to dry the surface in an immersion type lithographic apparatus is optimized to remove a liquid by establishing a pressure gradient in a liquid film on the dried surface. <P>COPYRIGHT: (C)2007,JPO&INPIT |
