| 摘要 |
PROBLEM TO BE SOLVED: To provide a self-washable substrate washing brush removing foreign matter of various sizes, and easily adjusting pressing quantity to the substrate. SOLUTION: This substrate washing brush is formed by providing channel brushes 20 formed by holding bristle-bundles with band-like long metallic fixtures, and by spirally winding several channel brushes 20 around a roller-like brush shaft 10 with equal intervals. By rotating the brush, a washing solution on the surface of the substrate is discharged along the equally intervals traces. Three channel brushes 20a, 20b, 20c are spirally wound around the brush shaft 10 with a tilted angle of 5-15°. Respective channel brushes 20 have different thicknesses (L, M, S) of bristles, being disposed in the order of getting softer stepwise from hard one discharging the washing solution without falling by the solution pressure. COPYRIGHT: (C)2007,JPO&INPIT
|
