DEVICE AND METHOD FOR GENERATING EXTREME ULTRAVIOLET-RAY

摘要

PROBLEM TO BE SOLVED: To provide a device and a method for generating extreme ultraviolet-ray.

SOLUTION: The purpose of the device and the method for generating extreme ultraviolet-ray is to provide a radiation source having electrodes with prolonged durable period for the use of various emitter. Deposits in a discharge chamber are considerably reduced when a metallic emitter is used. A starting row material is supplied as a series of continuous single volume continuously introduced by oriented injection and preliminarily ionized by a pulse energy beam. An electrode on which at least comparatively large thermal load is burdened is provided as a rotation electrode.

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