| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric vibrator and the piezoelectric vibrator, which reduce the cost, attain downsizing and a low height, and obtain a stable joining state. SOLUTION: The piezoelectric vibrator manufactured by the method comprises: a substrate 10; a piezoelectric element 40 mounted on the substrate 10; and a lid 20 provided thereon with a recessed part 21 for sealing the piezoelectric element 40, wherein the substrate 10 and the lid 20 are joined to block the recessed part 21. The method includes: the substrate 10 the surface of which is processed flat; circuit 60 connected to the piezoelectric element 40, provided at the substrate 10, and acting like an oscillator; a mount pattern 31 for mounting the piezoelectric element formed on the substrate 10; a laying pattern 32 for being externally laid around the mount pattern 31; an external mount pattern 33 connected to the laying pattern 32; a metallic film 34 formed on a joining face of the substrate 10; and the piezoelectric element 40 mounted to each mount pattern by GGI bonding. The substrates 10 and the lids 20 anodic-joined in a wafer state are made in piece. COPYRIGHT: (C)2007,JPO&INPIT
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