| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal pulling apparatus and a control method therefor, in which a single crystal is prevented from dropping in and after the process of forming a tale portion of a heavy weight single crystal with no dislocation even when a vibration is caused by an earthquake or the like of such a large magnitude creating fracture of a neck portion. SOLUTION: A single crystal pulling apparatus 1 pulls a single crystal C from a crucible 3 by the Czochralski method and is equipped with: a means 5 which pulls the single crystal C; a supporting means 7 which is installed for freely rising and falling along a path of pulling of the above single crystal C and has a holding means 16 for holding the tale portion of the single crystal C at the lower side; a vibration detecting means 17 which detects the vibration above the specified value; and a control means 8b which controls the motion of the above supporting means 7. The above control means 8b controls rising and falling movements of the supporting means 7 to locate the holding means 16 always near the tale portion when the tale portion of the single crystal C is formed, and make the holding means 16 to hold the tale portion when the detecting means 17 detects the vibration above the specified value. COPYRIGHT: (C)2007,JPO&INPIT
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