DEFECT INSPECTION DEVICE AND SUBSTRATE PRODUCTION SYSTEM USING THE SAME

摘要

A defect inspection device having an illumination section for irradiating an object to be inspected with illumination light in a manner in which an incident angle is variable and a light receiving section for receiving light from the object irradiated with light from the illumination section. The light receiving section receives the light emitted in substantially the same direction as the direction of incidence of the illumination light from the illumination section. ® KIPO & WIPO 2007