发明名称 Spectral metrology for high repetition rate gas discharge laser
摘要 A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter; the multivariable equation comprising a symmetry sensitive term.
申请公布号 US2007013913(A1) 申请公布日期 2007.01.18
申请号 US20050169202 申请日期 2005.06.27
申请人 CYMER, INC. 发明人 RAFAC ROBERT J.
分类号 G01J3/45;G01B9/02 主分类号 G01J3/45
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