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发明名称
Low compressive TiNx, materials and methods of making the same
摘要
Disclosed herein is a microelectromechanical device having a structural layer composed of a low stress TiN<SUB>x </SUB>layer and a method of making the same.
申请公布号
US2007015304(A1)
申请公布日期
2007.01.18
申请号
US20050183056
申请日期
2005.07.15
申请人
DOAN JONATHAN
发明人
DOAN JONATHAN
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
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地址
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