| 发明名称 |
Apparatus for calibrating optical scanner, method of manufacturing the same, and method of calibrating optical scanner using the same |
| 摘要 |
<p>Provided is a calibration apparatus for an optical scanner, including a substrate on which a molecule capable of forming an excimer is immobilized. A method of manufacturing the calibration apparatus and a method of calibrating an optical scanner using the calibration apparatus are also provided.
</p> |
| 申请公布号 |
EP1684061(A3) |
申请公布日期 |
2007.01.17 |
| 申请号 |
EP20050027638 |
申请日期 |
2005.12.16 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SHIM, JEO-YOUNG;JUNG, SUNG-OUK;NAMGOONG, JI-NA;YOO, KYU-TAE;MA, JANG-SEOK |
| 分类号 |
G01N21/27;C03C17/00;G01N21/64 |
主分类号 |
G01N21/27 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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