| 摘要 |
This invention relates to a drive device of an ultrasonic linear motor having a rail (11,42) and a base body (12,44) and driving parts (20,50) interposed between rail and base body. The base body is moved in a straight line with respect to the length direction of the rail by the driving parts. The driving parts are provided on left and right leg parts (12a, 44a) of the base body, and the load of the base body acts almost not at all on the driving part. The driving parts have ultrasonic vibrators (21,52) and rollers (25, 51) rotationally driven by the ultrasonic vibrators. The rollers are urged by urging means (22,53) toward and into contact with guiding side faces (11b, 11c, 42b, 42c) of the rail, driving forces generated by the driving parts act on the guiding side faces of the rail, and the base body moves in the length direction of the rail. |
