REGENERATION APPARATUS AND REGENERATION METHOD FOR ELECTROLESS PLATING

摘要

A regenerating apparatus and a regenerating method for an electroless plating solution by which the regenerating treatment of the electroless plating solution can be implemented efficiently and automatically are provided. A regeneration apparatus for an electroless plating solution comprises: a sensor(20b) for measuring the formation ratio of phosphorous acid formed in a plating tank(20) that responses to a plating treatment; a split device(21) for extracting a plating solution(100) in the plating tank that transfers the plating solution to a first treatment tank(11); an additional device(13) for supplying calcium carbonate or calcium hydroxide(104) to the first treatment tank in an amount required for generating calcium phosphate(105) from the phosphorous acid contained in the plating solution; a separation device(14) for separating and removing the calcium phosphate generated in the first treatment tank from the plating solution; a return pump(22) for transferring the calcium phosphate separated and removed plating solution to the plating tank; and a controller(10) for controlling transfer rates of the split device and the return pump.