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发明名称
APPARATUS FOR ION IMPLANTATION
摘要
申请公布号
EP1130623(A4)
申请公布日期
2007.01.17
申请号
EP19990951161
申请日期
1999.10.29
申请人
APPLIED MATERIALS, INC.
发明人
ITO, HIROYUKI;ASECHI, HIROSHI
分类号
H01J37/02;C23C14/48;H01J37/317;H01L21/265
主分类号
H01J37/02
代理机构
代理人
主权项
地址
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