SUBSTRATE SUPPORTING DEVICE COMPRISING MEMBER OF GOING UP AND DOWN

摘要

A substrate support apparatus including an elevation member is provided to prevent a lift pin from being fixed in a lift pin hole and damage of the lift pin by employing the elevation member for smoothing upward and downward movements of the lift pin. A lift pin is coupled to through units(131a,132a) of a susceptor where a substrate is placed. An elevation member(120) elevates by being inter-worked with upward and downward movements of the lift pin. A guide member(110) is installed around the elevation member to guide an elevation movement thereof. The elevation member includes a body and a connecting unit(122). The body has an inserting hole(121) where the lift pin is inserted. The connecting unit is formed on a periphery unit of the body to be connected to the guide member.