HEATING CRUCIBLE OF ORGANIC THIN FILM FORMING APPARATUS

摘要

A heating crucible of an organic thin film forming apparatus is provided to prevent the clogging of a nozzle, by including a thermal conductive unit contacting with an inner side of a crucible body and a cover. A crucible body(141) comprises an aperture(142), and is formed to accommodate an organic material in the inside. A cover(143) includes a nozzle dispensing the organic material, and covers the aperture. A heater(144) is installed to surround the crucible body. A thermal conductive unit(145) contacts with an inner side of the crucible body and the cover.