发明名称 Semiconductor device with silicon-film fins and method of manufacturing the same
摘要 A semiconductor device includes a semiconductor substrate, an insulating film projected on a surface of the semiconductor substrate, a semiconductor film provided on a side surface of the insulating film, and MIS transistor formed in the semiconductor film, the MIS transistor having source, gate and drain region. The semiconductor device further includes a gate electrode provided on the gate region of the MIS transistor, the length of the gate electrode being larger than the thickness of the semiconductor film.
申请公布号 US7164175(B2) 申请公布日期 2007.01.16
申请号 US20040835122 申请日期 2004.04.28
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KAWASAKI HIROHISA;ISHIMARU KAZUNARI
分类号 H01L27/08;H01L29/76;H01L21/336;H01L21/8238;H01L21/8242;H01L21/8244;H01L21/84;H01L27/02;H01L27/092;H01L27/11;H01L27/12;H01L29/786 主分类号 H01L27/08
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