| 摘要 |
A forced vent system in a TCS(trichlorosilane) automatic refill system is provided to safely and rapidly process TCS remaining gas by using a manual valve between a vent line and a pump. TCS gas is stored in at least one TCS bottles(100,110). A process line(210) outflows the TCS gas stored in the TCS bottle. N2 gas is supplied to a purifying air line(220) and a process air line(200) from the outside. At least one valve controls the flow line of the N2 gas supplied through the purifying air line and the process air line. A vent line(230) exhausts the N2 gas circulated through the flow line. A pump(310) is formed on a side of the vent line to strongly flow the N2 gas. A manual valve(300) is disposed between the vent line and the pump to control the flow amount of the N2 gas out flowed.
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