APPARATUS AND METHOD OF MEASURING THE CURVATURE USING ARRAYED MULTIPLE BEAM

摘要

An apparatus for measuring curvature using arrayed multiple beams and a method thereof are provided to project the vertical incidence angle by using the view port and to reduce size by using the VCSEL or LD array. An apparatus(T1) for measuring curvature is composed of an m x n light source array(10) for generating the m x n multiple beam; a single collimating lens unit making the m x n multiple beam generated from the m x n light source array into an m x n non-parallel beam(C2) and projecting the m x n non-parallel beam on the sample surface; and a detector(40) for measuring the interval change between the m x n spot arrays of the m x n multiple beam reflected from the sample surface.