| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for easily manufacturing a narrow-pitch wire-grid polarizer at a low cost. <P>SOLUTION: The method for manufacturing wire-grid polarizer comprises: a process of forming a photosensitive film 103 on a metal thin film 101; a process of applying two-beam interference exposure for the photosensitive film 103; a process of applying two beam interference exposure for the photosensitive film 103 again while shifting phase of interference wave; a process of disclosing a large number of linear protrusion parts 103a which are substantially parallel, by developing the photosensitive film 103; a process of forming an anti-etching film 111 by obliquely forming an anti-etching material for the photosensitive film 103; a process of etching the photosensitive film 103 by using the anti-etching film 111 as a mask; and a process of etching the metal thin film 101 by using the photosensitive film 103 as a mask. <P>COPYRIGHT: (C)2007,JPO&INPIT |
