| 摘要 |
PROBLEM TO BE SOLVED: To provide a lead-free glass composition being suitable for a white dielectric layer and having excellent acid resistance and a low softening point. SOLUTION: Acid resistances are different with a degree corresponding to the difference of the following compositions since a rib material layer does not contain ZrO<SB>2</SB>while an overcoat contains about 1-10% ZrO<SB>2</SB>. That is, in an etching treatment, an etching speed at the overcoat is lower than that of the rib material layer, for example, the speed is about 1/10 to 1/3. Consequently, the overcoat is approximately kept in an initial state in which the overcoat is almost not dissolved while completely removing a part in the opening part by dissolving the rib material layer in accordance with an opening pattern of a resist film by regulating an acid concentration and a treating time of the etching treatment. That is, a partition wall 14 provided with a desired dimension and shape according to the opening pattern of the resist film is formed. COPYRIGHT: (C)2007,JPO&INPIT
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