发明名称 Semiconductor device and method for fabricating the same
摘要 A semiconductor device includes: an n-transistor including a first gate insulating film made of a high-dielectric-constant material and a first gate electrode fully silicided with a metal, the first gate insulating film and the first gate electrode being formed in this order over a semiconductor region; and a p-transistor including a second gate insulating film made of the high-dielectric-constant material and a second gate electrode fully silicided with the metal, the second gate insulating film and the second gate electrode being formed in this order over the semiconductor region. If the metal has a work function larger than a Fermi level in potential energy of electrons of silicon, a metal concentration of the second gate electrode is higher than that of the first gate electrode whereas if the metal has a work function smaller than the Fermi level of silicon, a metal concentration of the second gate electrode is lower than that of the first gate electrode.
申请公布号 US2007007564(A1) 申请公布日期 2007.01.11
申请号 US20060371253 申请日期 2006.03.09
申请人 HAYASHI SHIGENORI;MITSUHASHI RIICHIRO 发明人 HAYASHI SHIGENORI;MITSUHASHI RIICHIRO
分类号 H01L29/94 主分类号 H01L29/94
代理机构 代理人
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