发明名称 |
PIEZO ACTUATOR FOR COOLING |
摘要 |
A piezo actuator includes a plurality of layers of ceramic material, a plurality of layers of conductive material interspersed between the plurality of layers of ceramic material, and a plate attached to an end of the actuator. The plate of the piezo actuator includes an overhang portion. |
申请公布号 |
WO2007005915(A2) |
申请公布日期 |
2007.01.11 |
申请号 |
WO2006US26107 |
申请日期 |
2006.06.30 |
申请人 |
INTEL CORPORATION;PALANDUZ, CENGIZ A.;SAUCIUC, IOAN;PAYDAR, REZA |
发明人 |
PALANDUZ, CENGIZ A.;SAUCIUC, IOAN;PAYDAR, REZA |
分类号 |
H01L41/083;F04D33/00;H01L41/24 |
主分类号 |
H01L41/083 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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