发明名称 PIEZO ACTUATOR FOR COOLING
摘要 A piezo actuator includes a plurality of layers of ceramic material, a plurality of layers of conductive material interspersed between the plurality of layers of ceramic material, and a plate attached to an end of the actuator. The plate of the piezo actuator includes an overhang portion.
申请公布号 WO2007005915(A2) 申请公布日期 2007.01.11
申请号 WO2006US26107 申请日期 2006.06.30
申请人 INTEL CORPORATION;PALANDUZ, CENGIZ A.;SAUCIUC, IOAN;PAYDAR, REZA 发明人 PALANDUZ, CENGIZ A.;SAUCIUC, IOAN;PAYDAR, REZA
分类号 H01L41/083;F04D33/00;H01L41/24 主分类号 H01L41/083
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