| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for inspections, capable of accurately and precisely inspecting even such a substrate that a gradual unevenness of application exists on the whole of the substrate. SOLUTION: The method and the apparatus for inspecting a display panel comprise: an illuminating means; an imaging means which captures an image by mainly receiving a portion of reflected light which is emitted as an incident light from the illuminating means toward a liquid phosphor layer and reflected by the layer at an angle approximately identical to the incident angle of the incident light; and a signal processing means. In the method and the apparatus, a curvature radius of the liquid phosphor layer is obtained based on a curvature radius coefficient and the intensity of the reflected light acquired by the imaging means, and a height value of the liquid phosphor layer is calculated from the curvature radius, an upper spacing of diaphragms on the both sides of the liquid phosphor layer, and height values of the diaphragms. The method and the apparatus can be deployed for measuring a curvature radius of a general curved surface to be measured. COPYRIGHT: (C)2007,JPO&INPIT
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