| 摘要 |
PROBLEM TO BE SOLVED: To reduce power consumption of a heating resistor by improving a heating efficiency thereof, to improve strength of a substrate at the lower section of the heating resistor and to readily manufacture the heating resistor at a low cost. SOLUTION: In a heating resistor element component 1, a plurality of heating resistors 4 are arranged on a silicon substrate 2 at intervals, and wires 5a, 5b for supplying power to each of the heating resistors 4 are connected thereto. A hollow section 8 penetrating through the silicon substrate 2 in the thickness direction is provided to an area of the silicon substrate 2 which is covered by each heating resistor 4. COPYRIGHT: (C)2007,JPO&INPIT
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