发明名称 Semiconductor device having silicide film and method of manufacturing the same
摘要 A semiconductor device having a semiconductor substrate, a SRAM area formed in the semiconductor substrate, the SRAM area having first transistors, the first transistor having a metallic compound film formed on each of a source and a drain regions of the first transistor, and a logic circuit area formed in the semiconductor substrate, the logic circuit area having a second transistor, the second transistor having a metallic compound film on each of a source and a drain regions of the second transistor. The thickness of the metallic compound film of the second transistor is thicker than thickness of the metallic compound film of the first transistor.
申请公布号 US2007007566(A1) 申请公布日期 2007.01.11
申请号 US20060481592 申请日期 2006.07.06
申请人 ISHIMARU KAZUNARI 发明人 ISHIMARU KAZUNARI
分类号 H01L29/94 主分类号 H01L29/94
代理机构 代理人
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