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发明名称
Entfernungs- und Einbringungsvorrichtung für einen Behälterdeckel
摘要
申请公布号
DE60122748(T2)
申请公布日期
2007.01.11
申请号
DE20016022748T
申请日期
2001.11.21
申请人
RIGHT MFG. CO. LTD.
发明人
NAGATA, TATSUHIKO
分类号
H01L21/00;H01L21/677;H01L21/68
主分类号
H01L21/00
代理机构
代理人
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地址
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