PARYLENE COATING AND METHOD FOR THE PRODUCTION THEREOF

摘要

The invention relates to a method for producing a parylene coating on a substrate comprising an integrated electronic component, e.g. an X-ray detector. Said method comprises the following steps: parylene is evaporated; the evaporated parylene is pyrolyzed, the pyrolyzed parylene is polymerized, the polymerized parylene being deposited on a cooled substrate. The inventive method allows parylene to be deposited in a controllable, structured manner on the cooled and/or heated substrate. Advantageously, X-ray converters can be anticorrosively encapsulated, for example, while the penetration depth of the parylene between fluorescent needles or storage fluorescent needles can be controlled, resulting in an improved resolution and an improved modulation transfer function of electronic components.