| 摘要 |
[PROBLEMS] A sheet-like probe and a method of producing the probe, where the probe can achieve stable connection even for a circuit device having small electrodes with fine intervals, where electrode structure bodies do not come out from an insulation film and achieve high durability, and where, in a burn-in test for a wafer having a large area and for a circuit device having to-be- inspected electrodes with small intervals, positional displacement, caused by temperature variation, between the electrode structure bodies and the to-be-inspected electrode can be reliably prevented so that excellent connection condition is stably maintained. [MEANS FOR SOLVING PROBLEMS] A sheet-like probe having an insulation layer and having a contact film provided with electrode structure bodies that are arranged on the insulation layer so as to be apart from each other in the surface direction of the insulation layer and penetratingly extend in the thickness direction of the insulation layer. The electrode structure bodies each are composed of a surface electrode section that is exposed to the front surface of the insulation layer, projects from the front surface of the insulation layer, and has a shape whose diameter is reduced from its base end toward its head, a back surface electrode section that is exposed to the back surface of the insulation layer, and a short-circuit section that extends from the base end of the front surface electrode section, penetrates the insulation layer in its thickness direction, and is connected to the back surface electrode direction. The diameter of the base end of the front surface electrode section is greater than the diameter of that end of the short-circuit section which is in contact with front surface electrode section, and the thickness of the short-circuit section is greater than the thickness of the insulation section. ® KIPO & WIPO 2007 |
