| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a purification tube which can miniaturize its size and a circulation purifying apparatus for air or inert gas equipped with the purification tube. <P>SOLUTION: The circulation purifying apparatus comprises a purification tube 31. The purification tube 31 comprises a catalyzer layer 36 at the upstream side in a stream direction of inert gas in a tube body 32 and an adsorbent layer 38 at the downstream in a stream direction from the catalyzer layer 36 and further comprises a heater 43 for heating the catalyzer layer 36 and the adsorbent layer 38 in the tube body 32. In addition, the purification tube 31 comprises a temperature regulation means regulating so that the heating temperature of the catalyzer layer 36 by the heater 43 may become lower than the heating temperature of the adsorbent layer 38, wherein the catalyzer layer 36, the absorbent layer 38 and the heater 43 are arranged in one tube body 32. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
