PATTERN FORMING BODY AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pattern forming body capable of forming a high definition functional part on various substrates and to provide a manufacturing method of the pattern forming body.

SOLUTION: The manufacturing method of the pattern forming body has a plasma irradiation process in which a patterning substrate having: a base material; an intermediate layer formed on the substrate and including a silane coupling agent or a polymer of the silane coupling agent ; and the resin layer formed in a pattern shape on the intermediate layer, is irradiated with plasma from the side of a resin layer by using fluorine gas as an introduction gas.

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