| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flaw inspection device of an image capable of discriminating between true flaw, which shows an existing flaw, and a false flaw formed by background noise in a case that a pattern to be inspected exceeds the resolving limit of an imaging device and the contrast of an inspection image lowers, a visual examination device and a flaw inspection method of the image. <P>SOLUTION: It is discriminated that the flaw detected from the gray level difference signal of two images to be inspected is either one of the true flaw and the false flaw, corresponding to the S/N ratio of the gray level value signal of the original image to be inspected used in detection. <P>COPYRIGHT: (C)2007,JPO&INPIT |
