发明名称 Surface treatment method using ion beam and surface treating device
摘要 The problems to be solved by the present invention are to provide a novel surface treatment method and a surface treatment apparatus for surface cleaning or surface processing of a solid material, which utilize material that assumes a liquid state at normal temperature and pressure, and the surface treatment method according to the present invention as a solution to the problems is characterized in that ion beams formed by ionizing material which assumes a liquid state at normal temperature and pressure are radiated to the surface of a solid material. Further, the surface treatment apparatus according to the present invention is characterized in that the apparatus is equipped with a means for radiating ion beams formed by ionizing material which assumes a liquid state at normal temperature and pressure to the surface of a solid material.
申请公布号 US2007010095(A1) 申请公布日期 2007.01.11
申请号 US20040558475 申请日期 2004.05.28
申请人 KYOTO UNIVERSITY 发明人 TAKAOKA GIKAN
分类号 C23F1/00;B08B7/00;C23C14/22;H01J37/08;H01L21/302 主分类号 C23F1/00
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