摘要 |
The problems to be solved by the present invention are to provide a novel surface treatment method and a surface treatment apparatus for surface cleaning or surface processing of a solid material, which utilize material that assumes a liquid state at normal temperature and pressure, and the surface treatment method according to the present invention as a solution to the problems is characterized in that ion beams formed by ionizing material which assumes a liquid state at normal temperature and pressure are radiated to the surface of a solid material. Further, the surface treatment apparatus according to the present invention is characterized in that the apparatus is equipped with a means for radiating ion beams formed by ionizing material which assumes a liquid state at normal temperature and pressure to the surface of a solid material.
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