| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce noise caused by magnetic fields generated by drive signals and induced in electrodes for rotation detection in an electromagnetically-driven angular velocity sensor. <P>SOLUTION: A pair of electrodes 201a and 201b for drive is arranged at positions linearly symmetric to an Y-axis passing through the center point 10 of a cross-shaped weight 102 on the cross-shaped wight 102. By supplying in-phase drive signals for the electrodes 201a and 201b for drive, the drive signals makes the effects of magnetic fields generated between the electrodes for drive cancel each other. It is thereby possible to suppress electromagnetic induction noise (noise induced by magnetic fields generated by the drive signals) induced in the electrodes 202a, 202b, 203a, and 203b for rotation detection. <P>COPYRIGHT: (C)2007,JPO&INPIT |
