| 摘要 |
A method of transferring and depositing an organic electroluminescence device of a large area is provided to stably support a substrate by rotating the substrate at an angle of 180 degrees when clamping the loaded substrate is clamped. A rotator housing(20) is installed in a process chamber, and has a rotation shaft having both ends extending outwardly from the chamber and connected to a drive source. A holding frame(30) is installed on an upper portion of the housing, and a mask(35) is disposed on the holding frame. A mask chuck(40) is disposed to be opposite to the holding frame, and a substrate(b) is disposed on an upper surface of the mask chuck. A lift cylinder(50) is installed in the rotator housing, and an upper end of a rod(55) is connected to a bottom of the mask chuck. |
