发明名称 |
IMPROVED CAPACITIVE BASED PRESSURE SENSOR DESIGN |
摘要 |
A pressure transducer assembly includes a first body, a diaphragm, and an electrode. The diaphragm is mounted between the first and second bodies. The first body and the diaphragm form a first chamber. The second body and the diaphragm form a second chamber. The electrode is disposed in the first chamber. A portion of the diaphragm flexes in a first direction in response to pressure in the first chamber being greater than pressure in the second chamber. A portion of the diaphragm flexes in a second direction, opposite the first direction, in response to pressure in the second chamber being greater than pressure in the first chamber. A capacitance between the electrode and the diaphragm is representative of a difference between the pressures in the first and second chambers. In some embodiments, the electrode is suspended from a hub and spoke mounting. In some embodiments the electrode is entirely metallic. In other embodiments, the electrode includes a ceramic disk with a conductive film formed on the disk and the disk is coupled to the housing with a ceramic rod. In some embodiments, the transducer also has a low thermal coefficient of expansion member connected to the housing for reducing warping in response to temperature changes. In additional embodiments, the disk includes a groove that reduces the effects of temperature variations on a ceramic electrode. |
申请公布号 |
WO0214821(A2) |
申请公布日期 |
2002.02.21 |
申请号 |
WO2001US24836 |
申请日期 |
2001.08.08 |
申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
LUCAS, PAUL, D.;DENNER, JOHN;GRUDZIEN, CHRIS, P.;LISCHER, JEFF;WEIGHT, KRISTEN |
分类号 |
G01L9/12;G01L9/00;G01L19/04 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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