| 摘要 |
A flange of a vertical diffusion furnace is provided to basically prevent a gas connection part or a connection nozzle from being detached from a gas hole by external shock or operation by coupling a fix unit to the opposite side of the gas hole to which the gas connection part or the connection nozzle is inserted. A gas hole is formed in a cylindrical body(100). An upper connection part(200) protrudes from the upper part of the body. A lower connection part(300) protrudes from the lower part of the body. A gas connection part(400) is coupled to a fix unit(420) attached to the inner wall of the body, inserted into the gas hole. The fix unit is welded to the inner wall of the body.
|
