发明名称 |
SPM CANTILEVER AND METHOD OF MANUFACTURING THE SAME |
摘要 |
An SPM cantilever of the present invention including: a support portion (1) fabricated by processing a single crystal silicon wafer; a lever portion (2) formed in a manner extended from the support portion; a probe (3) disposed at a free end side of the lever portion; a coating of graphite film (5) covering all over the side on which the probe is formed and the entire probe; and a piece of thin line (6) consisting of a carbon nanofiber (CNF) or carbon nanotube (CNT) or graphite nanofiber (GNF) grown/formed from the graphite film at a probe terminal end portion (3a). |
申请公布号 |
EP1742034(A1) |
申请公布日期 |
2007.01.10 |
申请号 |
EP20050734701 |
申请日期 |
2005.04.20 |
申请人 |
OLYMPUS CORPORATION;NAGOYA INSTITUTE OF TECHNOLOGY |
发明人 |
KITAZAWA, MASASHI;OTA, RYO;TANEMURA, MASAKI |
分类号 |
G01Q60/16;G01Q60/24;G01Q60/32;G01Q60/38;G01Q70/12;G01Q70/16 |
主分类号 |
G01Q60/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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