| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor field effect biosensor allowing the adjustment of sensor sensitivity dispersion due to dispersion of a threshold value. SOLUTION: This semiconductor field effect biosensor uses a TFT formed on a substrate. The biosensor is so structured that the TFT has an ion sensing region 19 on the upper part of a channel region through a gate insulation film 18, and has a back gate 12 on the lower layer of the channel region through an insulation film 13. |
